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ASM Qualiflow AFC 260 Mass Flow Controller 500 SCCM MFC
ASM Qualiflow Therm AFC 260 MFC Mass Flow Controller 500 SCCM
Model: AFC 260 MFC
ASM Qualiflow Therm AFC 260 Mass Flow Controller Features:
The traditional analog Qualiflow Therm AFC 260 with elastomeric seals and reliable thermal valve :
- Compatible with other MFC
- Economic design, simple construction
Input and Output
- Mass Flow Controller: ±15 VDC, 200 mA
- Mass Flow Meter: ±15 VDC, 50 mA
- Input and Output Signal: from 0 to 5 VDC
- Electrical Connector: Card edge
ASM Qualiflow AFC 261 Mass Flow Specifications:
- Control Range:2 - 100% F.S.
- Valve Type: Thermal
- Valve Rest Position: Normally Open only
- Accuracy: ±1% of F.S.
- Linearity: ±0.5% of F.S.
- Repeatability: ±0.3% of F.S.
- Sensibility to Mounting Position: ±0.1% of F.S.
- Step Response Time: 6 sec. typical (SEMI E17-91)
Unit is sold as is, as pictured, without warranty unless stated
Above specifications are for the current model, some
specifications may vary slightly from the actual unit.
note all text and photos copyright 2012